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Semiconductor Parametric Test Systems

Complete DC and C-V measurement solution

Keithley’s S530 Semiconductor Parametric Test Systems are engineered to handle all the DC and C-V measurements required in process control monitoring, process reliability monitoring, and device characterization, and are designed for use in production and lab environments that entail a broad range of devices and technologies.

S530 Low Current

Series S530 Parametric Test Systems
  • pA current measurement capability
  • 20W SMUs provide up to 1A or 200V
  • Up to 8 SMUs and 48 pins full Kelvin
  • Compatible with fully automatic probers
  • C-V measurements up to 1MHz

S530 High Voltage

Series S530 Parametric Test Systems
  • 20W SMUs provide up to 1A or 200V
  • 1kV SMU to any system pin
  • Up to 7 SMUs and 24 pins full Kelvin
  • Compatible with fully automatic probers
  • C-V measurements up to 1MHz
 
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CALL NUMBER
1-800-935-5595 (US Only)